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	Simulation and experiment of the static FTIR based on micro multi-step mirrors (EI CONFERENCE)
	Liang J. ; Liang Z.-Z. ; Lv J.-G. ; Fu J.-G. ; Zheng Y. ; Feng C. ; Wang W.-B. ; Zhu W.-B. ; Yao J.-S. ; Zhang J.
	2011
会议名称	International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, May 24, 2011 - May 26, 2011
会议地点	Beijing, China
关键词	In recent years Fourier transform spectrometer (FTS) with small size and low mass is required in many applications with growing need for real-time and small platform spectral detection. In this paper a micro Fourier transform infrared spectrometer (FTIR) based on spatial modulation mode was designed. This spectrometer has the advantages of high stability and simplified configuration. It also promises optical path differences (OPD) with high precision as MOEMS technology is used in manufacturing the key components. The simulation and the experiments with regard to this FTIR configuration have been done. Firstly the diffraction effect of the micro multi-step mirrors (MMSMs) is studied. We discuss the influence to the reversed spectrum by different mirror widths and different diffraction distances. Secondly we simulate and analyze the influence of the source solid angle to the spectral resolution. Thirdly we set up the theoretical model of the collimation error which is mainly from the defocus of the optical system and analyze the result caused by the collimation error. Fourthly a new discrete Fourier transform arithmetic using least-squares cosines progression (LSCP) is proposed which can reconstruct the spectrum with nonuniform sampled signals. Finally the MMSMs are fabricated used the MOEMS technology and the structural parameters are tested. 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).
收录类别	EI
内容类型	会议论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/33742]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Liang J.,Liang Z.-Z.,Lv J.-G.,et al. Simulation and experiment of the static FTIR based on micro multi-step mirrors (EI CONFERENCE)[C]. 见:International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, May 24, 2011 - May 26, 2011. Beijing, China.

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