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	Study of dynamic response on a MOEMS 22 optical switch (EI CONFERENCE)
	Sun D. ; Dong W. ; Guo W. ; Liu C. ; Wang G. ; Yan X. ; Xu B. ; Chen W.
	2005
会议名称	Optical Transmission, Switching, and Subsystems II, November 9, 2004 - November 11, 2004
会议地点	Beijing, China
关键词	The MOEMS 22 optical switch with slant lower electrode and with torsion beam on silicon is designed and analyzed theoretically. Analytical formulae for the squeeze film damping coefficient and the squeeze film damping moment on the cantilever beam of the optical switch are derived. Based on the torsion dynamics theory the technique and relative results are presented for analyzing the actuating voltage and the switch time. The optimized result of parameters is as: length width and thickness of the torsion beam are 700 12 and 10 m length and width of the cantilever beam are 1900 and 1000 m length and width of the balance beam are 100 and 1000 m shortest spacing between the upper and lower electrodes is 0.05 m and highness of the lower electrode is 55 m respectively. The actuating voltage is less than 10 V and the switching time of Ton and Toff are 1.30ms and 1.25ms respectively. The computed results show that the air squeeze film damping is an important factor for the study of dynamic response on MOEMS optical switch.
页码	386-391
收录类别	EI
内容类型	会议论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/33325]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Sun D.,Dong W.,Guo W.,et al. Study of dynamic response on a MOEMS 22 optical switch (EI CONFERENCE)[C]. 见:Optical Transmission, Switching, and Subsystems II, November 9, 2004 - November 11, 2004. Beijing, China.

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