| Research on a novel R-θ wafer-handling robot | |
| Cong, Ming; Yu, Xu; Shen, Baohong; Liu, Jing | |
| 2007 | |
| 会议名称 | 2007 IEEE International Conference on Automation and Logistics, ICAL 2007 |
| 会议日期 | August 18, 2007 - August 21, 2007 |
| DOI | 10.1109/ICAL.2007.4338634 |
| 页码 | 597-602 |
| 收录类别 | EI |
| 会议录 | Proceedings of the IEEE International Conference on Automation and Logistics, ICAL 2007
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| URL标识 | 查看原文 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/6074550 |
| 专题 | 山东大学 |
| 作者单位 | Key Laboratory for Precision and Non-traditional Machining Technology, Ministry of Education, Dalian U |
| 推荐引用方式 GB/T 7714 | Cong, Ming,Yu, Xu,Shen, Baohong,et al. Research on a novel R-θ wafer-handling robot[C]. 见:2007 IEEE International Conference on Automation and Logistics, ICAL 2007. August 18, 2007 - August 21, 2007. |
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