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	An accurate in-fixture measurement method for AlN film bulk acoustic resonators
	Xu, Hang; Su, Yanjie; Yang, Hanlin; Xu, Dong; Zhang, Yafei; Chen, Da; Liu, Yijian
	2012
会议名称	2012 4th International Symposium on Information Science and Engineering, ISISE 2012
会议日期	December 14, 2012 - December 16, 2012
DOI	10.1109/ISISE.2012.46
页码	183-186
收录类别	EI
会议录	Proceedings of the 2012 4th International Symposium on Information Science and Engineering, ISISE 2012
URL标识	查看原文
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/6050490
专题	山东大学
作者单位	Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai,
推荐引用方式 GB/T 7714	Xu, Hang,Su, Yanjie,Yang, Hanlin,et al. An accurate in-fixture measurement method for AlN film bulk acoustic resonators[C]. 见:2012 4th International Symposium on Information Science and Engineering, ISISE 2012. December 14, 2012 - December 16, 2012.

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