| An Accurate In-Fixture Measurement Method for AlN Film Bulk Acoustic Resonators | |
| Xu, Hang; Su, Yanjie; Yang, Hanlin; Xu, Dong; Zhang, Yafei; Chen, Da; Liu, Yijian | |
| 2012 | |
| 会议名称 | 4th International Symposium on Information Science and Engineering (ISISE) |
| 会议日期 | DEC 14-16, 2012 |
| 关键词 | in-fixture FBAR de-embedding real-time accurate measurement |
| DOI | 10.1109/ISISE.2012.46 |
| 页码 | 183-186 |
| 收录类别 | CPCI-S |
| 会议录 | 2012 INTERNATIONAL SYMPOSIUM ON INFORMATION SCIENCE AND ENGINEERING (ISISE)
 |
| URL标识 | 查看原文 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/6047748 |
| 专题 | 山东大学 |
| 作者单位 | Shanghai Jiao Tong Univ, Inst Micro Nano Sci & Technol, Shanghai 200030, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Xu, Hang,Su, Yanjie,Yang, Hanlin,et al. An Accurate In-Fixture Measurement Method for AlN Film Bulk Acoustic Resonators[C]. 见:4th International Symposium on Information Science and Engineering (ISISE). DEC 14-16, 2012. |
| 个性服务 |
| 查看访问统计 |
| 相关权益政策 |
| 暂无数据 |
| 收藏/分享 |
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。
修改评论