Graphene-assisting photo-electrochemical etching of 4H-SiC | |
Sun, Li; Chen, Xiufang; Zhang, Fusheng; Yu, Cancan; Zhao, Xian; Xu, Xiangang; Zhang, Yong; Wang, Ruiqi | |
2016 | |
会议名称 | 2016 International Forum on Wide Bandgap Semiconductors China, IFWS 2016 |
会议日期 | November 15, 2016 - November 17, 2016 |
DOI | 10.1109/IFWS.2016.7803748 |
页码 | 27-30 |
收录类别 | EI |
会议录 | 2016 International Forum on Wide Bandgap Semiconductors China, IFWS 2016 - Conference Proceedings |
URL标识 | 查看原文 |
内容类型 | 会议论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/6031312 |
专题 | 山东大学 |
作者单位 | State Key Laboratory of Crystal Materials, Shandong University, Jinan |
推荐引用方式 GB/T 7714 | Sun, Li,Chen, Xiufang,Zhang, Fusheng,et al. Graphene-assisting photo-electrochemical etching of 4H-SiC[C]. 见:2016 International Forum on Wide Bandgap Semiconductors China, IFWS 2016. November 15, 2016 - November 17, 2016. |
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