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Graphene-assisting photo-electrochemical etching of 4H-SiC
Sun, Li; Chen, Xiufang; Zhang, Fusheng; Yu, Cancan; Zhao, Xian; Xu, Xiangang; Zhang, Yong; Wang, Ruiqi
2016
会议名称2016 International Forum on Wide Bandgap Semiconductors China, IFWS 2016
会议日期November 15, 2016 - November 17, 2016
DOI10.1109/IFWS.2016.7803748
页码27-30
收录类别EI
会议录2016 International Forum on Wide Bandgap Semiconductors China, IFWS 2016 - Conference Proceedings
URL标识查看原文
内容类型会议论文
URI标识http://www.corc.org.cn/handle/1471x/6031312
专题山东大学
作者单位State Key Laboratory of Crystal Materials, Shandong University, Jinan
推荐引用方式
GB/T 7714
Sun, Li,Chen, Xiufang,Zhang, Fusheng,et al. Graphene-assisting photo-electrochemical etching of 4H-SiC[C]. 见:2016 International Forum on Wide Bandgap Semiconductors China, IFWS 2016. November 15, 2016 - November 17, 2016.
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