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	Design of double-layer anti-sputtering targets for plume effects experimental system
	Shang, ShengFei; Cai, GuoBiao; Zhu, DingQiang; He, BiJiao
刊名	SCIENCE CHINA-TECHNOLOGICAL SCIENCES
	2016
卷号	59页码:1265-1275
关键词	electric propulsion anti-sputtering target vacuum chamber back-sputtering deposition beam target
ISSN号	1674-7321
DOI	10.1007/s11431-016-6037-y
URL标识	查看原文
收录类别	SCIE ; EI ; CSCD
WOS记录号	WOS:000381265400013
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/5958847
专题	北京航空航天大学
推荐引用方式 GB/T 7714	Shang, ShengFei,Cai, GuoBiao,Zhu, DingQiang,et al. Design of double-layer anti-sputtering targets for plume effects experimental system[J]. SCIENCE CHINA-TECHNOLOGICAL SCIENCES,2016,59:1265-1275.
APA	Shang, ShengFei,Cai, GuoBiao,Zhu, DingQiang,&He, BiJiao.(2016).Design of double-layer anti-sputtering targets for plume effects experimental system.SCIENCE CHINA-TECHNOLOGICAL SCIENCES,59,1265-1275.
MLA	Shang, ShengFei,et al."Design of double-layer anti-sputtering targets for plume effects experimental system".SCIENCE CHINA-TECHNOLOGICAL SCIENCES 59(2016):1265-1275.

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