Design of double-layer anti-sputtering targets for plume effects experimental system | |
Shang, ShengFei; Cai, GuoBiao; Zhu, DingQiang; He, BiJiao | |
刊名 | SCIENCE CHINA-TECHNOLOGICAL SCIENCES
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2016 | |
卷号 | 59页码:1265-1275 |
关键词 | electric propulsion anti-sputtering target vacuum chamber back-sputtering deposition beam target |
ISSN号 | 1674-7321 |
DOI | 10.1007/s11431-016-6037-y |
URL标识 | 查看原文 |
收录类别 | SCIE ; EI ; CSCD |
WOS记录号 | WOS:000381265400013 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/5958847 |
专题 | 北京航空航天大学 |
推荐引用方式 GB/T 7714 | Shang, ShengFei,Cai, GuoBiao,Zhu, DingQiang,et al. Design of double-layer anti-sputtering targets for plume effects experimental system[J]. SCIENCE CHINA-TECHNOLOGICAL SCIENCES,2016,59:1265-1275. |
APA | Shang, ShengFei,Cai, GuoBiao,Zhu, DingQiang,&He, BiJiao.(2016).Design of double-layer anti-sputtering targets for plume effects experimental system.SCIENCE CHINA-TECHNOLOGICAL SCIENCES,59,1265-1275. |
MLA | Shang, ShengFei,et al."Design of double-layer anti-sputtering targets for plume effects experimental system".SCIENCE CHINA-TECHNOLOGICAL SCIENCES 59(2016):1265-1275. |
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