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An empirical formula for E-z in the modified Sigmund formula for low energy heavy ion bombardment
Shang, Shengfei; Cai, Guobiao; Zhu, Dingqiang; He, Bijiao
刊名VACUUM
2016
卷号125页码:192-204
关键词Sputtering yield Sputtering threshold energy Eth Modified Sigmund's formula E-Z
ISSN号0042-207X
DOI10.1016/j.vacuum.2015.12.014
URL标识查看原文
收录类别SCIE ; EI
WOS记录号WOS:000370096500029
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/5954733
专题北京航空航天大学
推荐引用方式
GB/T 7714
Shang, Shengfei,Cai, Guobiao,Zhu, Dingqiang,et al. An empirical formula for E-z in the modified Sigmund formula for low energy heavy ion bombardment[J]. VACUUM,2016,125:192-204.
APA Shang, Shengfei,Cai, Guobiao,Zhu, Dingqiang,&He, Bijiao.(2016).An empirical formula for E-z in the modified Sigmund formula for low energy heavy ion bombardment.VACUUM,125,192-204.
MLA Shang, Shengfei,et al."An empirical formula for E-z in the modified Sigmund formula for low energy heavy ion bombardment".VACUUM 125(2016):192-204.
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