An empirical formula for E-z in the modified Sigmund formula for low energy heavy ion bombardment | |
Shang, Shengfei; Cai, Guobiao; Zhu, Dingqiang; He, Bijiao | |
刊名 | VACUUM
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2016 | |
卷号 | 125页码:192-204 |
关键词 | Sputtering yield Sputtering threshold energy Eth Modified Sigmund's formula E-Z |
ISSN号 | 0042-207X |
DOI | 10.1016/j.vacuum.2015.12.014 |
URL标识 | 查看原文 |
收录类别 | SCIE ; EI |
WOS记录号 | WOS:000370096500029 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/5954733 |
专题 | 北京航空航天大学 |
推荐引用方式 GB/T 7714 | Shang, Shengfei,Cai, Guobiao,Zhu, Dingqiang,et al. An empirical formula for E-z in the modified Sigmund formula for low energy heavy ion bombardment[J]. VACUUM,2016,125:192-204. |
APA | Shang, Shengfei,Cai, Guobiao,Zhu, Dingqiang,&He, Bijiao.(2016).An empirical formula for E-z in the modified Sigmund formula for low energy heavy ion bombardment.VACUUM,125,192-204. |
MLA | Shang, Shengfei,et al."An empirical formula for E-z in the modified Sigmund formula for low energy heavy ion bombardment".VACUUM 125(2016):192-204. |
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