Self-enhanced plasma discharge effect in the deposition of diamond-like carbon films on the inner surface of slender tube | |
Xu, Yi; Li, Liuhe; Luo, Sida; Lu, Qiuyuan; Gu, Jiabin; Lei, Ning; Huo, Chunqin | |
刊名 | APPLIED SURFACE SCIENCE |
2017 | |
卷号 | 393页码:467-473 |
关键词 | Enhanced glow discharge-plasma immersion ion implantation and deposition (EGD-PIII&D) Diamond-like carbon (DLC) Inner surface Self-enhanced plasma discharge |
ISSN号 | 0169-4332 |
DOI | 10.1016/j.apsusc.2016.10.049 |
URL标识 | 查看原文 |
收录类别 | SCIE ; EI |
WOS记录号 | WOS:000389090700055 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/5942578 |
专题 | 北京航空航天大学 |
推荐引用方式 GB/T 7714 | Xu, Yi,Li, Liuhe,Luo, Sida,et al. Self-enhanced plasma discharge effect in the deposition of diamond-like carbon films on the inner surface of slender tube[J]. APPLIED SURFACE SCIENCE,2017,393:467-473. |
APA | Xu, Yi.,Li, Liuhe.,Luo, Sida.,Lu, Qiuyuan.,Gu, Jiabin.,...&Huo, Chunqin.(2017).Self-enhanced plasma discharge effect in the deposition of diamond-like carbon films on the inner surface of slender tube.APPLIED SURFACE SCIENCE,393,467-473. |
MLA | Xu, Yi,et al."Self-enhanced plasma discharge effect in the deposition of diamond-like carbon films on the inner surface of slender tube".APPLIED SURFACE SCIENCE 393(2017):467-473. |
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