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Self-enhanced plasma discharge effect in the deposition of diamond-like carbon films on the inner surface of slender tube
Xu, Yi; Li, Liuhe; Luo, Sida; Lu, Qiuyuan; Gu, Jiabin; Lei, Ning; Huo, Chunqin
刊名APPLIED SURFACE SCIENCE
2017
卷号393页码:467-473
关键词Enhanced glow discharge-plasma immersion ion implantation and deposition (EGD-PIII&D) Diamond-like carbon (DLC) Inner surface Self-enhanced plasma discharge
ISSN号0169-4332
DOI10.1016/j.apsusc.2016.10.049
URL标识查看原文
收录类别SCIE ; EI
WOS记录号WOS:000389090700055
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/5942578
专题北京航空航天大学
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GB/T 7714
Xu, Yi,Li, Liuhe,Luo, Sida,et al. Self-enhanced plasma discharge effect in the deposition of diamond-like carbon films on the inner surface of slender tube[J]. APPLIED SURFACE SCIENCE,2017,393:467-473.
APA Xu, Yi.,Li, Liuhe.,Luo, Sida.,Lu, Qiuyuan.,Gu, Jiabin.,...&Huo, Chunqin.(2017).Self-enhanced plasma discharge effect in the deposition of diamond-like carbon films on the inner surface of slender tube.APPLIED SURFACE SCIENCE,393,467-473.
MLA Xu, Yi,et al."Self-enhanced plasma discharge effect in the deposition of diamond-like carbon films on the inner surface of slender tube".APPLIED SURFACE SCIENCE 393(2017):467-473.
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