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	mu m-resolution thickness distribution measurement of transparent glass films by using a multi-wavelength phase-shift extraction method in the large lateral shearing interferometer
	Ren, Yugang; Cao, Zhang; Tang, Xiaoyang; Xie, Heng; Xu, Lijun
刊名	OPTICS EXPRESS
	2019
卷号	27页码:2899-2914
关键词	Extraction Glass Light modulators Real time control Shearing Thickness control Thickness measurement Lateral shearing interferometer Multi-wavelengths Phase shift extraction Real-time implementations Spatial light modulators Thickness distributions Thickness of the film Transparent glass Interferometers
ISSN号	1094-4087
DOI	10.1364/OE.27.002899
URL标识	查看原文
收录类别	SCIE ; EI
WOS记录号	WOS:000457585600097
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/5922088
专题	北京航空航天大学
推荐引用方式 GB/T 7714	Ren, Yugang,Cao, Zhang,Tang, Xiaoyang,et al. mu m-resolution thickness distribution measurement of transparent glass films by using a multi-wavelength phase-shift extraction method in the large lateral shearing interferometer[J]. OPTICS EXPRESS,2019,27:2899-2914.
APA	Ren, Yugang,Cao, Zhang,Tang, Xiaoyang,Xie, Heng,&Xu, Lijun.(2019).mu m-resolution thickness distribution measurement of transparent glass films by using a multi-wavelength phase-shift extraction method in the large lateral shearing interferometer.OPTICS EXPRESS,27,2899-2914.
MLA	Ren, Yugang,et al."mu m-resolution thickness distribution measurement of transparent glass films by using a multi-wavelength phase-shift extraction method in the large lateral shearing interferometer".OPTICS EXPRESS 27(2019):2899-2914.

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