| A Study on Equivalent Circuit Model of RF Discharge Based on Multi-Physics Field | |
| Fu, Xinkai; Dai, Fei; Hu, Ruitao | |
| 刊名 | APPLIED COMPUTATIONAL ELECTROMAGNETICS SOCIETY JOURNAL
 |
| 2019 | |
| 卷号 | 34页码:956-961 |
| 关键词 | Equivalent circuit model multi-physics simulation RF discharge |
| ISSN号 | 1054-4887 |
| URL标识 | 查看原文 |
| 收录类别 | SCIE ; EI |
| WOS记录号 | WOS:000476625700020 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/5917626 |
| 专题 | 北京航空航天大学 |
| 推荐引用方式 GB/T 7714 | Fu, Xinkai,Dai, Fei,Hu, Ruitao. A Study on Equivalent Circuit Model of RF Discharge Based on Multi-Physics Field[J]. APPLIED COMPUTATIONAL ELECTROMAGNETICS SOCIETY JOURNAL,2019,34:956-961. |
| APA | Fu, Xinkai,Dai, Fei,&Hu, Ruitao.(2019).A Study on Equivalent Circuit Model of RF Discharge Based on Multi-Physics Field.APPLIED COMPUTATIONAL ELECTROMAGNETICS SOCIETY JOURNAL,34,956-961. |
| MLA | Fu, Xinkai,et al."A Study on Equivalent Circuit Model of RF Discharge Based on Multi-Physics Field".APPLIED COMPUTATIONAL ELECTROMAGNETICS SOCIETY JOURNAL 34(2019):956-961. |
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