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The properties of transparent conducting molybdenum-doped ZnO films grown by radio frequency magnetron sputtering
修显武[1]; 赵文静[2]
2012
卷号21期号:6页码:409-412
关键词射频磁控溅射 ZnO薄膜 透明导电 钼掺杂 氧化锌薄膜 属性 低电阻率 无线电频率
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内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/5785939
专题山东师范大学
作者单位1.[1]School of Physics and Electronics, Shandong Normal University, Jinan 250014, China
2.[2]Jinan No.3 Vocational School, Jinan 250001, China
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GB/T 7714
修显武[1],赵文静[2]. The properties of transparent conducting molybdenum-doped ZnO films grown by radio frequency magnetron sputtering[J],2012,21(6):409-412.
APA 修显武[1],&赵文静[2].(2012).The properties of transparent conducting molybdenum-doped ZnO films grown by radio frequency magnetron sputtering.,21(6),409-412.
MLA 修显武[1],et al."The properties of transparent conducting molybdenum-doped ZnO films grown by radio frequency magnetron sputtering".21.6(2012):409-412.
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