Fabrication of large-scale alpha-Si3N4 nanotubes on Si(111) by hot-wall chernical-vapor-deposition with the assistance of Ga2O3 | |
Wei, QQ; Xue, CS; Sun, ZC; Zhuang, HZ; Cao, WT; Wang, SY; Dong, ZH | |
2004 | |
卷号 | 229期号:1-4页码:9-12 |
URL标识 | 查看原文 |
WOS记录号 | WOS:000221680100003 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/5780729 |
专题 | 山东师范大学 |
作者单位 | [1]Shandong Normal Univ, Inst Semicond, Jinan 250014, Peoples R China |
推荐引用方式 GB/T 7714 | Wei, QQ,Xue, CS,Sun, ZC,et al. Fabrication of large-scale alpha-Si3N4 nanotubes on Si(111) by hot-wall chernical-vapor-deposition with the assistance of Ga2O3[J],2004,229(1-4):9-12. |
APA | Wei, QQ.,Xue, CS.,Sun, ZC.,Zhuang, HZ.,Cao, WT.,...&Dong, ZH.(2004).Fabrication of large-scale alpha-Si3N4 nanotubes on Si(111) by hot-wall chernical-vapor-deposition with the assistance of Ga2O3.,229(1-4),9-12. |
MLA | Wei, QQ,et al."Fabrication of large-scale alpha-Si3N4 nanotubes on Si(111) by hot-wall chernical-vapor-deposition with the assistance of Ga2O3".229.1-4(2004):9-12. |
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