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Fabrication of large-scale alpha-Si3N4 nanotubes on Si(111) by hot-wall chernical-vapor-deposition with the assistance of Ga2O3
Wei, QQ; Xue, CS; Sun, ZC; Zhuang, HZ; Cao, WT; Wang, SY; Dong, ZH
2004
卷号229期号:1-4页码:9-12
URL标识查看原文
WOS记录号WOS:000221680100003
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/5780729
专题山东师范大学
作者单位[1]Shandong Normal Univ, Inst Semicond, Jinan 250014, Peoples R China
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GB/T 7714
Wei, QQ,Xue, CS,Sun, ZC,et al. Fabrication of large-scale alpha-Si3N4 nanotubes on Si(111) by hot-wall chernical-vapor-deposition with the assistance of Ga2O3[J],2004,229(1-4):9-12.
APA Wei, QQ.,Xue, CS.,Sun, ZC.,Zhuang, HZ.,Cao, WT.,...&Dong, ZH.(2004).Fabrication of large-scale alpha-Si3N4 nanotubes on Si(111) by hot-wall chernical-vapor-deposition with the assistance of Ga2O3.,229(1-4),9-12.
MLA Wei, QQ,et al."Fabrication of large-scale alpha-Si3N4 nanotubes on Si(111) by hot-wall chernical-vapor-deposition with the assistance of Ga2O3".229.1-4(2004):9-12.
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