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	Structural and mechanical properties of AIN films by pulsed bias arc ion plating
	Zhang, Min; Lin, Guoqiang; Wu, Aimin; Hao, Shengzhi; Dong, Chuang; Wen, Lishi
	2007
会议名称	6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
会议日期	2007-11-05
会议地点	Jeju, Korea, Republic of
页码	1157-1160
会议录	6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
URL标识	查看原文
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/5673381
专题	大连理工大学
作者单位	State Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams, Dalian University of Technology, Dalian 116024, China
推荐引用方式 GB/T 7714	Zhang, Min,Lin, Guoqiang,Wu, Aimin,et al. Structural and mechanical properties of AIN films by pulsed bias arc ion plating[C]. 见:6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6. Jeju, Korea, Republic of. 2007-11-05.

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