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Trench isotope cell electrode manufacturing method, involves executing thermal oxidization to silicon dioxide mask layer on surface of P type silicon, and sputtering metal sputter to lift off redundant metal of outside of metal electrode.
PIAO X WANG P CHU J BOK S
2008
公开日期2008-05-07
URL标识查看原文
申请日期2007-09-14
内容类型专利
URI标识http://www.corc.org.cn/handle/1471x/5613730
专题大连理工大学
作者单位UNIV DALIAN TECHNOLOGY UNIV DALIAN TECHNOLOGY (UYDA-C
推荐引用方式
GB/T 7714
PIAO X WANG P CHU J BOK S. Trench isotope cell electrode manufacturing method, involves executing thermal oxidization to silicon dioxide mask layer on surface of P type silicon, and sputtering metal sputter to lift off redundant metal of outside of metal electrode.. 2008-01-01.
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