Trench isotope cell electrode manufacturing method, involves executing thermal oxidization to silicon dioxide mask layer on surface of P type silicon, and sputtering metal sputter to lift off redundant metal of outside of metal electrode. | |
PIAO X WANG P CHU J BOK S | |
2008 | |
公开日期 | 2008-05-07 |
URL标识 | 查看原文 |
申请日期 | 2007-09-14 |
内容类型 | 专利 |
URI标识 | http://www.corc.org.cn/handle/1471x/5613730 |
专题 | 大连理工大学 |
作者单位 | UNIV DALIAN TECHNOLOGY UNIV DALIAN TECHNOLOGY (UYDA-C |
推荐引用方式 GB/T 7714 | PIAO X WANG P CHU J BOK S. Trench isotope cell electrode manufacturing method, involves executing thermal oxidization to silicon dioxide mask layer on surface of P type silicon, and sputtering metal sputter to lift off redundant metal of outside of metal electrode.. 2008-01-01. |
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