| Effect of RF power on the properties of transparent conducting zirconium-doped zinc oxide films prepared by RF magnetron sputtering | |
| 吕茂水[1]; 庞智勇[1]; 修显武[1]; 戴瑛[1]; 韩圣浩[1] | |
| 刊名 | 中国物理B：英文版
 |
| 2007 | |
| 期号 | 02 |
| 关键词 | 射频磁控管溅射 锆掺杂 氧化锌膜 透明导电膜 射频功率 |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/5581566 |
| 专题 | 山东大学 |
| 作者单位 | School of Physics and Microelectronics, State Key Laboratory of Crystal Materials, Shandong University, Jinan 25010 |
| 推荐引用方式 GB/T 7714 | 吕茂水[1],庞智勇[1],修显武[1],et al. Effect of RF power on the properties of transparent conducting zirconium-doped zinc oxide films prepared by RF magnetron sputtering[J]. 中国物理B：英文版,2007(02). |
| APA | 吕茂水[1],庞智勇[1],修显武[1],戴瑛[1],&韩圣浩[1].(2007).Effect of RF power on the properties of transparent conducting zirconium-doped zinc oxide films prepared by RF magnetron sputtering.中国物理B：英文版(02). |
| MLA | 吕茂水[1],et al."Effect of RF power on the properties of transparent conducting zirconium-doped zinc oxide films prepared by RF magnetron sputtering".中国物理B：英文版 .02(2007). |
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