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	Structural, optical and electrical properties of AZO/Cu/AZO tri-layer films prepared by radio frequency magnetron sputtering and ion-beam sputtering
	Yang, Tianlin; Zhang, Zhisheng; Song, Shumei; Li, Yanhui; Lv, MaoShui; Wu, Zhongchen; Han, Shenghao
刊名	VACUUM
	2008
卷号	83期号:2页码:257-260
关键词	AZO Tri-layer films Ion-beam sputtering Transparent conducting films
DOI	10.1016/j.vacuum.2008.05.029
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/5573173
专题	山东大学
作者单位	1.Tianjin Univ, Sch Elect & Informat Engn, Tianjin 300072, Peoples R China. 2.[Yang, Tianlin 3.Song, Shumei 4.Li, Yanhui
推荐引用方式 GB/T 7714	Yang, Tianlin,Zhang, Zhisheng,Song, Shumei,et al. Structural, optical and electrical properties of AZO/Cu/AZO tri-layer films prepared by radio frequency magnetron sputtering and ion-beam sputtering[J]. VACUUM,2008,83(2):257-260.
APA	Yang, Tianlin.,Zhang, Zhisheng.,Song, Shumei.,Li, Yanhui.,Lv, MaoShui.,...&Han, Shenghao.(2008).Structural, optical and electrical properties of AZO/Cu/AZO tri-layer films prepared by radio frequency magnetron sputtering and ion-beam sputtering.VACUUM,83(2),257-260.
MLA	Yang, Tianlin,et al."Structural, optical and electrical properties of AZO/Cu/AZO tri-layer films prepared by radio frequency magnetron sputtering and ion-beam sputtering".VACUUM 83.2(2008):257-260.

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