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	Structural, electrical and optical properties of zirconium-doped zinc oxide films prepared by radio frequency magnetron sputtering
	Lv MS; Xiu XW; Pang ZY; Dai Y; Ye L; Cheng CF; Han SH
刊名	Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films
	2008
卷号	516期号:8页码:2017-2021
关键词	zirconium zinc oxide sputtering transparent conducting oxide TRANSPARENT CONDUCTING FILMS LIGHT-EMITTING-DIODES ZNO THIN-FILMS SPRAY-PYROLYSIS RESISTIVITY DEPOSITION PRESSURE ZNO-ZRO2 R.F.
DOI	10.1016/j.tsf.2007.06.173
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/5572087
专题	山东大学
作者单位	1.School of Physics and Microelectronics, State Key Laboratory of Crystal Materials, Shandong University, Jinan, 250100 Shandong, China 2.[ Xiu, X
推荐引用方式 GB/T 7714	Lv MS,Xiu XW,Pang ZY,et al. Structural, electrical and optical properties of zirconium-doped zinc oxide films prepared by radio frequency magnetron sputtering[J]. Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2008,516(8):2017-2021.
APA	Lv MS.,Xiu XW.,Pang ZY.,Dai Y.,Ye L.,...&Han SH.(2008).Structural, electrical and optical properties of zirconium-doped zinc oxide films prepared by radio frequency magnetron sputtering.Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,516(8),2017-2021.
MLA	Lv MS,et al."Structural, electrical and optical properties of zirconium-doped zinc oxide films prepared by radio frequency magnetron sputtering".Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films 516.8(2008):2017-2021.

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