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	Influence of the texture on Raman and X-ray diffraction characteristics of polycrystalline AlN films
	Chen, Da; Xu, Dong; Wang, Jingjing; Zhao, Bo; Zhang, Yafei
刊名	THIN SOLID FILMS
	2008
卷号	517期号:2页码:986-989
关键词	Aluminum nitride Reactive sputtering Phonon mode X-ray diffraction Raman scattering Residual stress
DOI	10.1016/j.tsf.2008.07.029
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/5567886
专题	山东大学
作者单位	Shanghai Jiao Tong Univ, Natl Key Lab Nano Micro Fabricat Technol, Key Lab Thin Film & Microfabricat, Min
推荐引用方式 GB/T 7714	Chen, Da,Xu, Dong,Wang, Jingjing,et al. Influence of the texture on Raman and X-ray diffraction characteristics of polycrystalline AlN films[J]. THIN SOLID FILMS,2008,517(2):986-989.
APA	Chen, Da,Xu, Dong,Wang, Jingjing,Zhao, Bo,&Zhang, Yafei.(2008).Influence of the texture on Raman and X-ray diffraction characteristics of polycrystalline AlN films.THIN SOLID FILMS,517(2),986-989.
MLA	Chen, Da,et al."Influence of the texture on Raman and X-ray diffraction characteristics of polycrystalline AlN films".THIN SOLID FILMS 517.2(2008):986-989.

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