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Structural and optical properties of zinc nitride films prepared by rf magnetron sputtering
Yang, Tianlin; Zhang, Zhisheng; Li, Yanhui; Lv, MaoShui; Song, Shumei; Wu, Zhongchen; Yan, Jincheng; Han, Shenghao
刊名APPLIED SURFACE SCIENCE
2009
卷号255期号:6页码:3544-3547
关键词Zinc nitride rf magnetron sputtering Optical band gap
DOI10.1016/j.apsusc.2008.07.210
URL标识查看原文
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/5524314
专题山东大学
作者单位Shandong Univ, Dept Space Sci & Appl Phys, Weihai
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GB/T 7714
Yang, Tianlin,Zhang, Zhisheng,Li, Yanhui,et al. Structural and optical properties of zinc nitride films prepared by rf magnetron sputtering[J]. APPLIED SURFACE SCIENCE,2009,255(6):3544-3547.
APA Yang, Tianlin.,Zhang, Zhisheng.,Li, Yanhui.,Lv, MaoShui.,Song, Shumei.,...&Han, Shenghao.(2009).Structural and optical properties of zinc nitride films prepared by rf magnetron sputtering.APPLIED SURFACE SCIENCE,255(6),3544-3547.
MLA Yang, Tianlin,et al."Structural and optical properties of zinc nitride films prepared by rf magnetron sputtering".APPLIED SURFACE SCIENCE 255.6(2009):3544-3547.
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