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The influence of defects and impurities in polycrystalline AlN films on the violet and blue photoluminescence
Chen, Da; Wang, Jingjing; Xu, Dong; Zhang, Yafei
刊名VACUUM
2009
卷号83期号:5页码:865-868
关键词Aluminum nitride films Sputtering Photoluminescence
DOI10.1016/j.vacuum.2008.09.003
URL标识查看原文
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/5519606
专题山东大学
作者单位Shanghai Jiao Tong Univ, Minist Educ, Inst Micronano Sci & Technol, Natl Key Lab Nanomicro Fabricat Technol,Key Lab
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GB/T 7714
Chen, Da,Wang, Jingjing,Xu, Dong,et al. The influence of defects and impurities in polycrystalline AlN films on the violet and blue photoluminescence[J]. VACUUM,2009,83(5):865-868.
APA Chen, Da,Wang, Jingjing,Xu, Dong,&Zhang, Yafei.(2009).The influence of defects and impurities in polycrystalline AlN films on the violet and blue photoluminescence.VACUUM,83(5),865-868.
MLA Chen, Da,et al."The influence of defects and impurities in polycrystalline AlN films on the violet and blue photoluminescence".VACUUM 83.5(2009):865-868.
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