The influence of defects and impurities in polycrystalline AlN films on the violet and blue photoluminescence | |
Chen, Da; Wang, Jingjing; Xu, Dong; Zhang, Yafei | |
刊名 | VACUUM |
2009 | |
卷号 | 83期号:5页码:865-868 |
关键词 | Aluminum nitride films Sputtering Photoluminescence |
DOI | 10.1016/j.vacuum.2008.09.003 |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/5519606 |
专题 | 山东大学 |
作者单位 | Shanghai Jiao Tong Univ, Minist Educ, Inst Micronano Sci & Technol, Natl Key Lab Nanomicro Fabricat Technol,Key Lab |
推荐引用方式 GB/T 7714 | Chen, Da,Wang, Jingjing,Xu, Dong,et al. The influence of defects and impurities in polycrystalline AlN films on the violet and blue photoluminescence[J]. VACUUM,2009,83(5):865-868. |
APA | Chen, Da,Wang, Jingjing,Xu, Dong,&Zhang, Yafei.(2009).The influence of defects and impurities in polycrystalline AlN films on the violet and blue photoluminescence.VACUUM,83(5),865-868. |
MLA | Chen, Da,et al."The influence of defects and impurities in polycrystalline AlN films on the violet and blue photoluminescence".VACUUM 83.5(2009):865-868. |
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