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	Fabrication of 3D SiO x structures using patterned PMMA sacrificial layer.
	Zhiqin Li; Quan Xiang; Mengjie Zheng; Kaixi Bi; Yiqin Chen; Keqiu Chen; Huigao Duan
刊名	Journal of Micromechanics & Microengineering
	2018
卷号	Vol.28 No.2页码:1
关键词	POLYMETHYLMETHACRYLATE ELECTRON beam lithography NANOFABRICATION SURFACE roughness FABRY-Perot resonators MICROPLATES REFRACTIVE index
ISSN号	1361-6439
URL标识	查看原文
公开日期	[db:dc_date_available]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/5467159
专题	湖南大学
作者单位	1.School of Physics and Electronics, State Key Laboratory of Advanced Design and Manufacturing for Vehicle Body, Hunan University, Changsha 410082, People’s Republic of China 2.College of Mechanical and Vehicle Engineering, State Key Laboratory of Advanced Design and Manufacturing for Vehicle Body, Hunan University, Changsha 410082, People’s Republic of China
推荐引用方式 GB/T 7714	Zhiqin Li,Quan Xiang,Mengjie Zheng,et al. Fabrication of 3D SiO x structures using patterned PMMA sacrificial layer.[J]. Journal of Micromechanics & Microengineering,2018,Vol.28 No.2:1.
APA	Zhiqin Li.,Quan Xiang.,Mengjie Zheng.,Kaixi Bi.,Yiqin Chen.,...&Huigao Duan.(2018).Fabrication of 3D SiO x structures using patterned PMMA sacrificial layer..Journal of Micromechanics & Microengineering,Vol.28 No.2,1.
MLA	Zhiqin Li,et al."Fabrication of 3D SiO x structures using patterned PMMA sacrificial layer.".Journal of Micromechanics & Microengineering Vol.28 No.2(2018):1.

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