Fabrication and release of silicon nitride micro string array by convection freeze sublimation method at atmospheric pressure | |
Chen, Jianfeng; Zhong, Min | |
刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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2018 | |
卷号 | Vol.28 No.10 |
关键词 | silicon nitride strings array convection freeze sublimation methods ultra-weak structure release cyclohexane adhesion |
ISSN号 | 0960-1317 |
URL标识 | 查看原文 |
公开日期 | [db:dc_date_available] |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/5464890 |
专题 | 湖南大学 |
作者单位 | Nanchang Univ, Dept Mech Engn, Nanchang, Jiangxi, Peoples R China |
推荐引用方式 GB/T 7714 | Chen, Jianfeng,Zhong, Min. Fabrication and release of silicon nitride micro string array by convection freeze sublimation method at atmospheric pressure[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2018,Vol.28 No.10. |
APA | Chen, Jianfeng,&Zhong, Min.(2018).Fabrication and release of silicon nitride micro string array by convection freeze sublimation method at atmospheric pressure.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,Vol.28 No.10. |
MLA | Chen, Jianfeng,et al."Fabrication and release of silicon nitride micro string array by convection freeze sublimation method at atmospheric pressure".JOURNAL OF MICROMECHANICS AND MICROENGINEERING Vol.28 No.10(2018). |
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