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	Fabrication and release of silicon nitride micro string array by convection freeze sublimation method at atmospheric pressure
	Chen, Jianfeng; Zhong, Min
刊名	JOURNAL OF MICROMECHANICS AND MICROENGINEERING
	2018
卷号	Vol.28 No.10
关键词	silicon nitride strings array convection freeze sublimation methods ultra-weak structure release cyclohexane adhesion
ISSN号	0960-1317
URL标识	查看原文
公开日期	[db:dc_date_available]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/5464890
专题	湖南大学
作者单位	Nanchang Univ, Dept Mech Engn, Nanchang, Jiangxi, Peoples R China
推荐引用方式 GB/T 7714	Chen, Jianfeng,Zhong, Min. Fabrication and release of silicon nitride micro string array by convection freeze sublimation method at atmospheric pressure[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2018,Vol.28 No.10.
APA	Chen, Jianfeng,&Zhong, Min.(2018).Fabrication and release of silicon nitride micro string array by convection freeze sublimation method at atmospheric pressure.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,Vol.28 No.10.
MLA	Chen, Jianfeng,et al."Fabrication and release of silicon nitride micro string array by convection freeze sublimation method at atmospheric pressure".JOURNAL OF MICROMECHANICS AND MICROENGINEERING Vol.28 No.10(2018).

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