A comparative study of selective dry and wet etching of germanium-tin on germanium | |
Yi Han; Yaoyao Li; Yuxin Song; Chaodan Chi; Zhenpu Zhang; Juanjuan Liu; Zhongyunsheng Zhu; Shumin Wang | |
刊名 | Semiconductor Science and Technology
![]() |
2018 | |
卷号 | Vol.33 No.8页码:085011 |
ISSN号 | 0268-1242 |
URL标识 | 查看原文 |
公开日期 | [db:dc_date_available] |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/5459850 |
专题 | 湖南大学 |
推荐引用方式 GB/T 7714 | Yi Han,Yaoyao Li,Yuxin Song,et al. A comparative study of selective dry and wet etching of germanium-tin on germanium[J]. Semiconductor Science and Technology,2018,Vol.33 No.8:085011. |
APA | Yi Han.,Yaoyao Li.,Yuxin Song.,Chaodan Chi.,Zhenpu Zhang.,...&Shumin Wang.(2018).A comparative study of selective dry and wet etching of germanium-tin on germanium.Semiconductor Science and Technology,Vol.33 No.8,085011. |
MLA | Yi Han,et al."A comparative study of selective dry and wet etching of germanium-tin on germanium".Semiconductor Science and Technology Vol.33 No.8(2018):085011. |
个性服务 |
查看访问统计 |
相关权益政策 |
暂无数据 |
收藏/分享 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论