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	A comparative study of selective dry and wet etching of germanium-tin on germanium
	Yi Han; Yaoyao Li; Yuxin Song; Chaodan Chi; Zhenpu Zhang; Juanjuan Liu; Zhongyunsheng Zhu; Shumin Wang
刊名	Semiconductor Science and Technology
	2018
卷号	Vol.33 No.8页码:085011
ISSN号	0268-1242
URL标识	查看原文
公开日期	[db:dc_date_available]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/5459850
专题	湖南大学
推荐引用方式 GB/T 7714	Yi Han,Yaoyao Li,Yuxin Song,et al. A comparative study of selective dry and wet etching of germanium-tin on germanium[J]. Semiconductor Science and Technology,2018,Vol.33 No.8:085011.
APA	Yi Han.,Yaoyao Li.,Yuxin Song.,Chaodan Chi.,Zhenpu Zhang.,...&Shumin Wang.(2018).A comparative study of selective dry and wet etching of germanium-tin on germanium.Semiconductor Science and Technology,Vol.33 No.8,085011.
MLA	Yi Han,et al."A comparative study of selective dry and wet etching of germanium-tin on germanium".Semiconductor Science and Technology Vol.33 No.8(2018):085011.

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