CORC  > 江苏大学
Run-to-run control for semiconductor manufacturing processes using extended state observer
Wang, Haiyan[1]; Tan, Fei[2]; Sheng, Biqi[3]; Bian, Jun[4]; Pan, Tianhong[5]
2016
会议名称28th Chinese Control and Decision Conference, CCDC 2016
会议日期2016-05-28
页码854-857
收录类别EI
URL标识查看原文
内容类型会议论文
URI标识http://www.corc.org.cn/handle/1471x/5369692
专题江苏大学
作者单位[1]School of Electrical Information and Engineering, Jiangsu University, Zhenjiang, Jiangsu, 2013, China [2]School of Electrical Information and Engineering, Jiangsu University, Zhenjiang, Jiangsu, 2013, China [3]School of Electrical Information and Engineering, Jiangsu University, Zhenjiang, Jiangsu, 2013, China |China Maritime Police Academy, Ningbo, Zhejiang, 315801, China[4]School of Electrical Information and Engineering, Jiangsu University, Zhenjiang, Jiangsu, 2013, China [5]School of Electrical Information and Engineering, Jiangsu University, Zhenjiang, Jiangsu, 2013, China
推荐引用方式
GB/T 7714
Wang, Haiyan[1],Tan, Fei[2],Sheng, Biqi[3],et al. Run-to-run control for semiconductor manufacturing processes using extended state observer[C]. 见:28th Chinese Control and Decision Conference, CCDC 2016. 2016-05-28.
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