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	Manufacturing method of piezoelectric micro-cantilever probe for e.g. atomic force microscope, involves photo-etching silicon cup for forming silicon needle and piezoelectric sensitive layer, and providing layer on micro-cantilever.
	CUI Y WANG L XIA J ZHANG L ZHAO J
	2009
公开日期	2009-11-18
URL标识	查看原文
申请日期	2009-06-18
内容类型	专利
URI标识	http://www.corc.org.cn/handle/1471x/5334783
专题	大连理工大学
作者单位	UNIV DALIAN TECHNOLOGY (UYDA-C
推荐引用方式 GB/T 7714	CUI Y WANG L XIA J ZHANG L ZHAO J. Manufacturing method of piezoelectric micro-cantilever probe for e.g. atomic force microscope, involves photo-etching silicon cup for forming silicon needle and piezoelectric sensitive layer, and providing layer on micro-cantilever.. 2009-01-01.

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