Method and apparatus for backside monitoring of VCSELs
JACKSON, ANDREW W.
2005-10-11
著作权人OPLINK COMMUNICATIONS, LLC
专利号US6954474
国家美国
文献子类授权发明
其他题名Method and apparatus for backside monitoring of VCSELs
英文摘要A VCSEL (vertical cavity surface emitting laser) is formed on the top surface of the substrate having an opposed bottom surface. In one exemplary embodiment, the opposed bottom surface is polished and coated with an anti-reflective coating. A photodetector is disposed beneath the bottom surface and is capable of detecting light emitted by the VCSEL. In another embodiment, an angle selective filter is disposed between the photodetector and the unpolished and uncoated bottom surface. The apparatus urges light emitted by the VCSEL to be detected by the photodetector and limits light from other sources from reaching the photodetector. A method for monitoring the optical output of a VCSEL includes providing one of the exemplary apparatuses, causing the VCSEL to emit light that is detected by the photodetector, and adjusting the optical output of the VCSEL based on the amount of light detected by the photodetector.
公开日期2005-10-11
申请日期2003-06-27
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/42763]  
专题半导体激光器专利数据库
作者单位OPLINK COMMUNICATIONS, LLC
推荐引用方式
GB/T 7714
JACKSON, ANDREW W.. Method and apparatus for backside monitoring of VCSELs. US6954474. 2005-10-11.
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