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	光導波路形成法
	加藤 和利; 秦 進; 吉田 淳一
	2000-01-07
著作权人	日本電信電話株式会社
专利号	JP3019271B2
国家	日本
文献子类	授权发明
其他题名	光導波路形成法
英文摘要	PURPOSE:To enhance the efficiency of optical coupling between elements by tapering not only the width but thickness as well of the optical waveguide formed on a semiconductor or dielectric substrate as compared with the conventional waveguides tapered only in the width relating to the method for forming the above-mentioned optical waveguide. CONSTITUTION:The method for forming the tapered optical waveguide on the semiconductor or dielectric substrate includes a 1st stage for laminating a 1st clad layer 2 consisting of a 1st material and a core layer 3 consisting of a 2nd material on the semiconductor or dielectric substrate 1, a 2nd stage for working at least the core layer 3 of the above-mentioned 1st clad layer 2 and core layer 3 by selective etching to the same tapered and ridge shape 30 as the shape of a mask 4 having the tapered shape by using this mask 4, a 3rd stage for non-selectively etching the tapered ridge-shaped core layer 30 after removal of the etching mask 4, and a 4th stage for laminating a 2nd clad layer 5 consisting of a 3rd material on the 1st clad layer 2 and the core layer 30.
公开日期	2000-03-13
申请日期	1991-04-05
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/42240]
专题	半导体激光器专利数据库
作者单位	日本電信電話株式会社
推荐引用方式 GB/T 7714	加藤 和利,秦 進,吉田 淳一. 光導波路形成法. JP3019271B2. 2000-01-07.

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