Semiconductor laser diode and method of manufacturing the same
HONG, SUNG UI; LEE, JIN HONG; KIM, JIN SOO; KWACK, HO SANG; OH, DAE KON
2009-03-24
著作权人ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
专利号US7508857
国家美国
文献子类授权发明
其他题名Semiconductor laser diode and method of manufacturing the same
英文摘要Provided are a semiconductor laser diode and a method of manufacturing the same. The semiconductor laser diode includes a lower cladding layer disposed on a substrate; a ridge including an optical waveguide layer, an active layer, an upper cladding layer, and an ohmic contact layer, which are sequentially stacked on the lower cladding layer, and having a predetermined width, which is obtained by performing a channel etching process on both sides of the ridge; an oxide layer disposed on surfaces of the upper and lower cladding layer to control the width of the ridge; a dielectric layer disposed on left and right channels of the ridge; an upper electrode layer disposed on the entire surface of the resultant structure to enclose the ridge and the dielectric layer; and a lower electrode layer disposed on a bottom surface of the substrate. The method is simpler than a conventional process of manufacturing a semiconductor laser diode. Also, by controlling a wet oxidation time, the width of a ridge can be freely controlled and an ohmic contact layer can be automatically formed.
公开日期2009-03-24
申请日期2005-11-02
状态授权
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/41990]  
专题半导体激光器专利数据库
作者单位ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
推荐引用方式
GB/T 7714
HONG, SUNG UI,LEE, JIN HONG,KIM, JIN SOO,et al. Semiconductor laser diode and method of manufacturing the same. US7508857. 2009-03-24.
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