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	Laser diode coupling to waveguide and method of making same using substrate etching
	GUPTA, MOOL C.
	1995-01-03
著作权人	EASTMAN KODAK COMPANY
专利号	US5379359
国家	美国
文献子类	授权发明
其他题名	Laser diode coupling to waveguide and method of making same using substrate etching
英文摘要	A method of making an optical device including a semiconductor laser and a waveguide optically coupled to the laser, includes the steps of providing a substrate formed from a material on which a semiconductor laser can be created; sequentially creating a plurality of layers of relatively different impurity types and concentrations on the substrate, to form a laser structured region; forming a first mirror at one edge of the laser structured region; removing a portion of the laser structured region opposite the one edge by etching the region to a preselected depth selected so that a waveguide mounted on the substrate in the etched region is vertically aligned with a light emitting portion of the laser structured region; and forming a second mirror on the edge of the laser structured region opposite the first edge and adjacent the etched portion. A waveguide structure mounted on the etched surface of the substrate adjacent the laser diode can be very efficiently coupled to the laser diode by aligning it only in the horizontal direction, which is not as critical as the vertical alignment.
公开日期	1995-01-03
申请日期	1992-09-29
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/41931]
专题	半导体激光器专利数据库
作者单位	EASTMAN KODAK COMPANY
推荐引用方式 GB/T 7714	GUPTA, MOOL C.. Laser diode coupling to waveguide and method of making same using substrate etching. US5379359. 1995-01-03.

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