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	Chemical treatment plasma apparatus for forming a ribbon-like plasma
	CHOUAN, YANNICK; LE CONTELLEC, MICHEL; MORIN, FRANCOIS; SAADA, SERGE
	1994-07-12
著作权人	FRANCE TELECOM ETABLISSEMENT AUTONOME DE DROIT PUBLIC
专利号	US5328515
国家	美国
文献子类	授权发明
其他题名	Chemical treatment plasma apparatus for forming a ribbon-like plasma
英文摘要	The apparatus incorporates a h.f. source (2), a plasma enclosure ( 4 ) having gas supplies, a vacuum pump (50), elements for coupling the source to the plasma enclosure, which is of a non-radiating type and which is shaped like a rectangular parallelepiped with first and second dielectric material faces parallel to the direction of the magnetic field and a third face having a rectangular opening (14) parallel to said field for forming a ribbon-like plasma, a treatment enclosure containing a mobile sample holder (18) communicating via the opening with the plasma enclosure. The coupling means have two linear waveguides (30, 38 ) with a rectangular cross-section oriented in the wave propagation direction and located on either side of the plasma enclosure, a horn (36) for coupling one of the guides to the plasma enclosure, whose cross-section widens in the magnetic field direction, the other guide being provided with a short-circuit (46).
公开日期	1994-07-12
申请日期	1993-05-03
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/40110]
专题	半导体激光器专利数据库
作者单位	FRANCE TELECOM ETABLISSEMENT AUTONOME DE DROIT PUBLIC
推荐引用方式 GB/T 7714	CHOUAN, YANNICK,LE CONTELLEC, MICHEL,MORIN, FRANCOIS,et al. Chemical treatment plasma apparatus for forming a ribbon-like plasma. US5328515. 1994-07-12.

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