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	Method for fabricating high efficiency semi-planar electro-optic modulators
	MARTIN, WILLIAM E.
	1975-11-04
著作权人	THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY
专利号	US3916510
国家	美国
文献子类	授权发明
其他题名	Method for fabricating high efficiency semi-planar electro-optic modulators
英文摘要	High efficiency semi-planar electro-optic modulators are fabricated by deiting an electro-optic epitaxial waveguiding layer on a low resistivity single crystal substrate and then depositing first and second electrodes on opposite sides of the composition. After the natural cleavage plane of the substrate material has been determined, the composite material is aligned in a suitable scribing means and the substrate is scribed parallel to its natural cleavage plane along two widely spaced parallel lines defining the entrance and exit faces of a plurality of modulators; then the composite material is scribed with multiple closely spaced parallel lines at 90.degree. to the previously scribed widely spaced parallel lines, for cleaving the composite material in situ completing the formation of a plurality of the desired modulators. The cleaved side surfaces of the modulators confine light energy to the waveguide portion. If desired, an optical buffer layer may be deposited on the substrate before deposition of the waveguiding material to minimize optical losses.
公开日期	1975-11-04
申请日期	1974-07-01
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/40096]
专题	半导体激光器专利数据库
作者单位	THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY
推荐引用方式 GB/T 7714	MARTIN, WILLIAM E.. Method for fabricating high efficiency semi-planar electro-optic modulators. US3916510. 1975-11-04.

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