QQ客服 官方微博 反馈留言

	Method of varying a characteristic of an optical vertical cavity structure formed by metalorganic vapor phase epitaxy
	HOU, HONG Q.; COLTRIN, MICHAEL E.; CHOQUETTE, KENT D.
	2001-07-10
著作权人	NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA, LLC
专利号	US6258615
国家	美国
文献子类	授权发明
其他题名	Method of varying a characteristic of an optical vertical cavity structure formed by metalorganic vapor phase epitaxy
英文摘要	A process for forming an array of vertical cavity optical resonant structures wherein the structures in the array have different detection or emission wavelengths. The process uses selective area growth (SAG) in conjunction with annular masks of differing dimensions to control the thickness and chemical composition of the materials in the optical cavities in conjunction with a metalorganic vapor phase epitaxy (MOVPE) process to build these arrays.
公开日期	2001-07-10
申请日期	1998-11-12
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/39730]
专题	半导体激光器专利数据库
作者单位	NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA, LLC
推荐引用方式 GB/T 7714	HOU, HONG Q.,COLTRIN, MICHAEL E.,CHOQUETTE, KENT D.. Method of varying a characteristic of an optical vertical cavity structure formed by metalorganic vapor phase epitaxy. US6258615. 2001-07-10.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。