歪量子井戸型半導体レーザ
石川 信
1998-12-11
著作权人日本電気株式会社
专利号JP2861166B2
国家日本
文献子类授权发明
其他题名歪量子井戸型半導体レーザ
英文摘要PURPOSE:To form a 0.98mum-band strain quantum well semiconductor laser having a high output and high reliability by providing an AlGaAs clad layer, an active layer having an SCH structure, and an AlyGa1-yAs clad layer on a GaAs substrate, and laminating In0.5Ga0.5P on the clad layers on both sides of a mesa unit. CONSTITUTION:An n-type Al0.3Ga0.7As clad layer 2, an active layer 3 having an InGaAs/GaAs-SCH structure, a P-type AlyGal-yAs clad layer 4 and a p-type GaAs cap layer 5 are sequentially laminated on an n-type GaAs substrate Then, with an SiO2 as a mask a mesa is formed in the layer 4 by phosphoric acid wet etching, and an n-type In0.5Ga0.5P buried layer 6 is selectively formed at a mesa side. y<0.38 is set, and the refractive index of the mesa unit is increased larger than the value of the layer 6 of the mesa side.
公开日期1999-02-24
申请日期1989-12-22
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/38770]  
专题半导体激光器专利数据库
作者单位日本電気株式会社
推荐引用方式
GB/T 7714
石川 信. 歪量子井戸型半導体レーザ. JP2861166B2. 1998-12-11.
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