Integrated optoelectronic device and method of fabricating the same
SHINODA, KAZUNORI; SHIOTA, TAKASHI; TSUCHIYA, TOMONOBU; KITATANI, TAKESHI; AOKI, MASAHIRO
2008-03-04
著作权人LUMENTUM JAPAN, INC.
专利号US7340142
国家美国
文献子类授权发明
其他题名Integrated optoelectronic device and method of fabricating the same
英文摘要An integrated optoelectronic device includes optical waveguide elements containing InGaAlAs as a principal component, formed on an InP substrate and connected in an end-to-end fashion by butt jointing. An InGaAsP layer is formed on the InP substrate to suppress the mass transport of InP during the fabrication of the integrated optoelectronic device. The InGaAsP layer is formed before the InP substrate is heated at a crystal growth temperature on the order of 700° C. to form the InGaAlAs optical waveguide element.
公开日期2008-03-04
申请日期2007-02-02
状态授权
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/38334]  
专题半导体激光器专利数据库
作者单位LUMENTUM JAPAN, INC.
推荐引用方式
GB/T 7714
SHINODA, KAZUNORI,SHIOTA, TAKASHI,TSUCHIYA, TOMONOBU,et al. Integrated optoelectronic device and method of fabricating the same. US7340142. 2008-03-04.
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