| Device and method to stabilize beam shape and symmetry for high energy pulsed laser applications | |
| HOFMANN, THOMAS | |
| 2019-07-03 | |
| 著作权人 | CYMER, LLC |
| 专利号 | EP2036168B1 |
| 国家 | 欧洲专利局 |
| 文献子类 | 授权发明 |
| 其他题名 | Device and method to stabilize beam shape and symmetry for high energy pulsed laser applications |
| 英文摘要 | A beam mixer for increasing intensity symmetry along a selected axis of a beam (wherein the beam extends from a first edge to a second edge along the axis) is disclosed and may include a plurality of mirrors establishing a spatially inverting path. For the beam mixer, the inverting path may have a beginning and an end and may be characterized in that a part of the beam near the first beam edge at the beginning of the path translates to the second beam edge at the end of the path. For this aspect, the beam mixer may further include an optic dividing the beam into first and second beam portions, the optic placing the first portion onto the inverting path and recombining the first and second portions onto a common path after the first portion has traveled along the inverting path thereby mixing the beam. |
| 公开日期 | 2019-07-03 |
| 申请日期 | 2007-05-22 |
| 状态 | 授权 |
| 内容类型 | 专利 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/37320]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | CYMER, LLC |
| 推荐引用方式 GB/T 7714 | HOFMANN, THOMAS. Device and method to stabilize beam shape and symmetry for high energy pulsed laser applications. EP2036168B1. 2019-07-03. |
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