Laser irradiating method and device for same
SHIDA, JUNICHI; CHUNG, SUK-HWAN; URYU, SHUICHI
2008-12-30
著作权人THE JAPAN STEEL WORKS, LTD.
专利号US7471712
国家美国
文献子类授权发明
其他题名Laser irradiating method and device for same
英文摘要Because a focal distance of a condenser lens is changed due to a change in temperature, when irradiation of a laser beam is restarted after the irradiation has stopped, it takes a long time to restore a temperature of the cooled lens to a given temperature, and the operating efficiency is deteriorated. A first mirror 5 that can be located at a reflection position I at which an optical path is blocked and a laser beam a is reflected, and a second mirror 6 that reflects the laser beam a which is reflected by the first mirror 5 are disposed between the condenser lens 2 and the object to be irradiated 4. The first mirror 5 is located at the reflection position I so that the laser beam a that is transmitted through the condenser lens 2 is sequentially reflected by the first and second mirrors 5 and 6, and an intensity of the laser beam a that is again reflected by the first mirror 5 is made to coincide with an intensity of the laser beam a that is reflected from the object to be irradiated 4, and the condenser lens 2 is heated in the same manner that the processing laser beam a is transmitted through the condenser lens 2 and irradiated on the object to be irradiated 4.
公开日期2008-12-30
申请日期2006-06-02
状态授权
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/37228]  
专题半导体激光器专利数据库
作者单位THE JAPAN STEEL WORKS, LTD.
推荐引用方式
GB/T 7714
SHIDA, JUNICHI,CHUNG, SUK-HWAN,URYU, SHUICHI. Laser irradiating method and device for same. US7471712. 2008-12-30.
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