Large-Scale Assembly of Single-Walled Carbon Nanotube Field Effect Transistor

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 机器人学研究室

	Large-Scale Assembly of Single-Walled Carbon Nanotube Field Effect Transistor
	Xu K(许可); Wu CD(吴成东); Tian XJ(田孝军); Yu HB(于海波); Dong ZL(董再励)
	2012
会议名称	2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
会议日期	August 29 - September1, 2012
会议地点	Xi'an
关键词	assembly large-scale SWCNT FET floating potential dielectrophoresis
页码	312-315
中文摘要	This paper is to the assembly and fabrication for typical nano device-SWCNT FET for example, facing the large-scale assembly and fabrication for nano devices, and carrying out the experimenal research. Assembly method of SWCNTs FET is by floating potential and dielectrophoresis principle. Six hundred devices were assembled less than per square centimeter. The experimental results showed that large-scale assembly was realized, and the success rate of ideal assembly for SWCNTs FET is achieved.
收录类别	EI ; CPCI（ISTP）
产权排序	1
会议录	2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
会议录出版者	IEEE
会议录出版地	New York, USA
语种	英语
ISBN号	978-1-4673-4590-3
WOS记录号	WOS:000319774400060
内容类型	会议论文
源URL	[http://ir.sia.cn/handle/173321/10207]
专题	沈阳自动化研究所_机器人学研究室
推荐引用方式 GB/T 7714	Xu K,Wu CD,Tian XJ,et al. Large-Scale Assembly of Single-Walled Carbon Nanotube Field Effect Transistor[C]. 见:2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO). Xi'an. August 29 - September1, 2012.