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	Optical coupling structures and the fabrication processes
	YOSHIMURA, TETSUZO; TAKAHASHI, YASUHITO; ROMAN, JAMES; MCCORMACK, MARK THOMAS; BEILIN, SOLOMON I.; WANG, WEN-CHOU VINCENT; INAO, MASAAKI
	2004-01-27
著作权人	FUJITSU LIMITED
专利号	US6684007
国家	美国
文献子类	授权发明
其他题名	Optical coupling structures and the fabrication processes
英文摘要	An optical apparatus including an optical substrate having an embedded waveguide and an optical device adapted to receive light transmitted from an end of the waveguide. The optical apparatus includes a coupling structure for coupling the optical device to the substrate. The coupling structure has a thin metallic layer with an aperture. At least a portion of the optical device is disposed in the aperture. A method for making an optical apparatus comprising forming an optical substrate having a waveguide embedded therein; depositing a metal layer over an end of the waveguide; and depositing a polymeric layer over the metal layer. An aperture is formed in the metal layer and in the polymeric layer by removing a portion of the metal layer and a portion of the polymeric layer disposed over the end of the waveguide. The method for making an optical apparatus also comprises inserting at least a portion of an optical device within the aperture so that the optical device is positioned to receive light from the first end of the waveguide.
公开日期	2004-01-27
申请日期	2001-05-09
状态	授权
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/36749]
专题	半导体激光器专利数据库
作者单位	FUJITSU LIMITED
推荐引用方式 GB/T 7714	YOSHIMURA, TETSUZO,TAKAHASHI, YASUHITO,ROMAN, JAMES,et al. Optical coupling structures and the fabrication processes. US6684007. 2004-01-27.

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