Optical coupling structures and the fabrication processes | |
YOSHIMURA, TETSUZO; TAKAHASHI, YASUHITO; ROMAN, JAMES; MCCORMACK, MARK THOMAS; BEILIN, SOLOMON I.; WANG, WEN-CHOU VINCENT; INAO, MASAAKI | |
2004-01-27 | |
著作权人 | FUJITSU LIMITED |
专利号 | US6684007 |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Optical coupling structures and the fabrication processes |
英文摘要 | An optical apparatus including an optical substrate having an embedded waveguide and an optical device adapted to receive light transmitted from an end of the waveguide. The optical apparatus includes a coupling structure for coupling the optical device to the substrate. The coupling structure has a thin metallic layer with an aperture. At least a portion of the optical device is disposed in the aperture. A method for making an optical apparatus comprising forming an optical substrate having a waveguide embedded therein; depositing a metal layer over an end of the waveguide; and depositing a polymeric layer over the metal layer. An aperture is formed in the metal layer and in the polymeric layer by removing a portion of the metal layer and a portion of the polymeric layer disposed over the end of the waveguide. The method for making an optical apparatus also comprises inserting at least a portion of an optical device within the aperture so that the optical device is positioned to receive light from the first end of the waveguide. |
公开日期 | 2004-01-27 |
申请日期 | 2001-05-09 |
状态 | 授权 |
内容类型 | 专利 |
源URL | [http://ir.opt.ac.cn/handle/181661/36749] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | FUJITSU LIMITED |
推荐引用方式 GB/T 7714 | YOSHIMURA, TETSUZO,TAKAHASHI, YASUHITO,ROMAN, JAMES,et al. Optical coupling structures and the fabrication processes. US6684007. 2004-01-27. |
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