Metallized paths on diamond surfaces
DAUTREMONT-SMITH, WILLIAM C.; FELDMAN, LEONARD C.; KALISH, RAFAEL; KATZ, AVISHAY; MILLER, BARRY; MORIYA, NETZER
1994-08-02
著作权人AT&T BELL LABORATORIES
专利号US5334306
国家美国
文献子类授权发明
其他题名Metallized paths on diamond surfaces
英文摘要A graphite path is formed along the surface of a diamond plate, preferably a CVD diamond plate, by means of a laser or ion-implantation induced conductivity. The path advantageously can be the surface of a sidewall of a via hole drilled by the laser through the plate or a path running along a side surface of the plate from top to bottom opposed major surfaces of the plate. The graphite path is metallized, as by electroplating or electroless plating. In this way, for example, an electrically conducting connection can be made between a metallized backplane located on the bottom surface of the plate and a wire-bonding pad located on the top surface of the plate.
公开日期1994-08-02
申请日期1992-11-19
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/36123]  
专题半导体激光器专利数据库
作者单位AT&T BELL LABORATORIES
推荐引用方式
GB/T 7714
DAUTREMONT-SMITH, WILLIAM C.,FELDMAN, LEONARD C.,KALISH, RAFAEL,et al. Metallized paths on diamond surfaces. US5334306. 1994-08-02.
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