Metallized paths on diamond surfaces | |
DAUTREMONT-SMITH, WILLIAM C.; FELDMAN, LEONARD C.; KALISH, RAFAEL; KATZ, AVISHAY; MILLER, BARRY; MORIYA, NETZER | |
1994-08-02 | |
著作权人 | AT&T BELL LABORATORIES |
专利号 | US5334306 |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Metallized paths on diamond surfaces |
英文摘要 | A graphite path is formed along the surface of a diamond plate, preferably a CVD diamond plate, by means of a laser or ion-implantation induced conductivity. The path advantageously can be the surface of a sidewall of a via hole drilled by the laser through the plate or a path running along a side surface of the plate from top to bottom opposed major surfaces of the plate. The graphite path is metallized, as by electroplating or electroless plating. In this way, for example, an electrically conducting connection can be made between a metallized backplane located on the bottom surface of the plate and a wire-bonding pad located on the top surface of the plate. |
公开日期 | 1994-08-02 |
申请日期 | 1992-11-19 |
状态 | 失效 |
内容类型 | 专利 |
源URL | [http://ir.opt.ac.cn/handle/181661/36123] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | AT&T BELL LABORATORIES |
推荐引用方式 GB/T 7714 | DAUTREMONT-SMITH, WILLIAM C.,FELDMAN, LEONARD C.,KALISH, RAFAEL,et al. Metallized paths on diamond surfaces. US5334306. 1994-08-02. |
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