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	Optical-mechanical vibrating beam accelerometer
	FERTIG, CHAD; SAVCHENKO, ARTHUR; TIN, STEVEN
	2018-05-29
著作权人	HONEYWELL INTERNATIONAL INC., PATENT SERVICES M/S AB/2B
专利号	US9983225
国家	美国
文献子类	授权发明
其他题名	Optical-mechanical vibrating beam accelerometer
英文摘要	Systems, devices, techniques, and methods are disclosed for an opto-mechanical vibrating beam accelerometer. In one example, a system is configured to couple a laser into optical resonance with opto-mechanically active (OMA) anchors suspending a proof mass; lock frequencies of the laser to optical resonances of the OMA anchors, resulting in a modulated laser coupled with the OMA anchors; demodulate a photocurrent that detects the modulated laser coupled with the OMA anchors to detect at least an amplitude or a phase of the modulated laser; lock a frequency of the modulated laser to dynamically track instantaneous resonance frequencies of mechanical modes of the OMA anchors through changes to the amplitude or phase of the modulated laser induced by coupling of the modulated laser to the OMA anchors; and measure an acceleration based on instantaneous resonance frequencies of the OMA anchors through changes to the amplitude or phase of the modulated laser.
公开日期	2018-05-29
申请日期	2016-01-14
状态	授权
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/35661]
专题	半导体激光器专利数据库
作者单位	HONEYWELL INTERNATIONAL INC., PATENT SERVICES M/S AB/2B
推荐引用方式 GB/T 7714	FERTIG, CHAD,SAVCHENKO, ARTHUR,TIN, STEVEN. Optical-mechanical vibrating beam accelerometer. US9983225. 2018-05-29.

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