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	Quantum well, beam deflecting surface emitting lasers
	KIM, JAE H.
	1992-10-27
著作权人	UNITED STATES OF AMERICA, THE, AS REPRESENTED BY THE ADMINISTRATOR NATIONAL AERONAUTICS AND SPACE ADMINISTRATION
专利号	US5159603
国家	美国
文献子类	授权发明
其他题名	Quantum well, beam deflecting surface emitting lasers
英文摘要	A surface emitting laser or SEL having a pair of vertical oscillator mirrors and a pair of integrated 45 DEG beam deflectors etched in a pair of parallel grooves in a broad-area multilayered wafer by tilted ion beam etching. Each SEL has high output power, low threshold current density, relatively high efficiency, and is compatible with large scale optoelectronic integrated circuit technology. One embodiment includes a lattice matched, unstrained AlGaAs/GaAs single quantum well (SQW) optical cavity in a graded index separate confinement heterostructure (GRINSCH). A second embodiment is a 945 nm lattice-mismatched or pseudomorphic In0.15Ga0.85As/AlGaAs SQW optical cavity SEL in a GRINSCH configuration in which the lattice mismatch is accommodated by elastic deformation of the lattice. Strain-induced reduction of valence band non-parabolicity and effective density states permits operation with a relatively low threshold current and improved spectral and dynamic properties. The GaAs substrate is transparent to the emitted radiation providing increased flexibility in circuit design because radiation may be coupled both up through the grooves and/or down through the substrate. Emitting radiation in both directions permits three dimensional optoelectronic circuits to be fabricated both above and below this embodiment and enhances coupling to other optical devices, including fiber optic rods.
公开日期	1992-10-27
申请日期	1991-06-05
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/34949]
专题	半导体激光器专利数据库
作者单位	UNITED STATES OF AMERICA, THE, AS REPRESENTED BY THE ADMINISTRATOR NATIONAL AERONAUTICS AND SPACE ADMINISTRATION
推荐引用方式 GB/T 7714	KIM, JAE H.. Quantum well, beam deflecting surface emitting lasers. US5159603. 1992-10-27.

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