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	Method and system for adaptively controlling a laser-based material processing process and method and system for qualifying same
	GRIFFITHS, JOSEPH J.; PELSUE, KURT
	2016-07-05
著作权人	ELECTRO SCIENTIFIC INDUSTRIES, INC.
专利号	US9383732
国家	美国
文献子类	授权发明
其他题名	Method and system for adaptively controlling a laser-based material processing process and method and system for qualifying same
英文摘要	A method and system for adaptively controlling a laser-based material processing process are provided. The system includes sensing equipment to measure a process variable or condition of at least one of a laser-based material processing system and a workpiece processed by the material processing system and to provide a corresponding measurement signal. The control system also includes a signal processor for processing the measurement signal to obtain a processed signal which initiates, at least semi-automatically, an action associated with at least one of the material processing system and the workpiece. A method and system for at least semi-automatically qualifying a laser-based material processing system which delivers laser energy to locations on or adjacent a plurality of microstructures formed on a workpiece to at least partially process the microstructures are also provided.
公开日期	2016-07-05
申请日期	2013-12-02
状态	授权
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/34191]
专题	半导体激光器专利数据库
作者单位	ELECTRO SCIENTIFIC INDUSTRIES, INC.
推荐引用方式 GB/T 7714	GRIFFITHS, JOSEPH J.,PELSUE, KURT. Method and system for adaptively controlling a laser-based material processing process and method and system for qualifying same. US9383732. 2016-07-05.

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