Vertical cavity surface emitting laser element, vertical cavity surface emitting laser array, optical scanning device, and image forming apparatus
HANAOKA, KATSUNARI
2013-12-03
著作权人RICOH COMPANY, LTD.
专利号US8599233
国家美国
文献子类授权发明
其他题名Vertical cavity surface emitting laser element, vertical cavity surface emitting laser array, optical scanning device, and image forming apparatus
英文摘要A disclosed vertical cavity surface emitting laser element includes a substrate, a laminated body sandwiching a semiconductor active layer with an upper reflecting mirror and a lower reflecting mirror, a lower electrode, and an upper electrode. The laser element emits laser light in a direction perpendicular to the surface of the substrate when an electric current is supplied between the upper electrode and the lower electrode. The laser element further includes a selective oxidation layer in the upper reflecting mirror having a current blocking structure made of an oxidized region and an unoxidized region, and a detectable portion formed on a side surface of a mesa structure shaped by the upper reflecting mirror including the selective oxidation layer and the active layer, thereby enabling detecting the position of the selective oxidation layer from a top of the laminated body in a depth direction of the laminated body.
公开日期2013-12-03
申请日期2009-12-22
状态授权
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/34049]  
专题半导体激光器专利数据库
作者单位RICOH COMPANY, LTD.
推荐引用方式
GB/T 7714
HANAOKA, KATSUNARI. Vertical cavity surface emitting laser element, vertical cavity surface emitting laser array, optical scanning device, and image forming apparatus. US8599233. 2013-12-03.
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