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	Effect of Sample Configuration on Droplet-Particles of TiN Films Deposited by Pulse Biased Arc Ion Plating
	Zhao, Yanhui; Liu, Guoqiang; Xiao, Jinquan; Dong, Chuang; Wen, Lishi
刊名	JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
	2009
卷号	25页码:681-686
关键词	Arc ion plating Pulsed bias TiN film Droplet-particles
ISSN号	1005-0302
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/5309681
专题	大连理工大学
作者单位	1.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China. 2.Dalian Univ Technol, Minist Educ, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116085, Peoples R China.
推荐引用方式 GB/T 7714	Zhao, Yanhui,Liu, Guoqiang,Xiao, Jinquan,et al. Effect of Sample Configuration on Droplet-Particles of TiN Films Deposited by Pulse Biased Arc Ion Plating[J]. JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,2009,25:681-686.
APA	Zhao, Yanhui,Liu, Guoqiang,Xiao, Jinquan,Dong, Chuang,&Wen, Lishi.(2009).Effect of Sample Configuration on Droplet-Particles of TiN Films Deposited by Pulse Biased Arc Ion Plating.JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,25,681-686.
MLA	Zhao, Yanhui,et al."Effect of Sample Configuration on Droplet-Particles of TiN Films Deposited by Pulse Biased Arc Ion Plating".JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY 25(2009):681-686.

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