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PIC Simulation of RF Hydrogen Discharge in an Transverse Magnetic field.
Sun JZ(孙继忠); Wang DZ(王德真)
2010
会议名称The 10th Asia Pacific Conference on Plasma Science and Technology and the 23rd Symposium on Plasma Science for Materials
会议录The 10th Asia Pacific Conference on Plasma Science and Technology and the 23rd Symposium on Plasma Science for Materials
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内容类型会议论文
URI标识http://www.corc.org.cn/handle/1471x/5279624
专题大连理工大学
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GB/T 7714
Sun JZ,Wang DZ. PIC Simulation of RF Hydrogen Discharge in an Transverse Magnetic field.[C]. 见:The 10th Asia Pacific Conference on Plasma Science and Technology and the 23rd Symposium on Plasma Science for Materials.
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