Al-Mg-B thin films prepared by magnetron sputtering | |
Wu, Zhanling; Bai, Yizhen; Qu, Wenchao; Wu, Aimin; Zhang, Dong; Zhao, Jijun; Jiang, Xin | |
刊名 | 5th Symposium on Vacuum based Science and Technology
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2010 | |
卷号 | 85页码:541-545 |
关键词 | Al-Mg-B thin films Magnetron sputtering Boron sputtering power Substrate temperature |
ISSN号 | 0042-207X |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/5271496 |
专题 | 大连理工大学 |
作者单位 | 1.Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China. 2.Dalian Univ Technol, Key Lab Mat Modificat Laser Ion & Elect Beams, Minist Educ, Dalian 116024, Peoples R China. 3.Dalian Univ Technol, Key Lab Mat Modificat Laser Ion & Elect Beams, Minist Educ, Dalian 116024, Peoples R China. 4.Dalian Univ Technol, Sch Mat Sci & Engn, Dalian 116024, Peoples R China. 5.Dalian Univ Technol, Sch Mat Sci & Engn, Dalian 116024, Peoples R China. 6.Univ Siegen, Inst Mat Engn, D-57076 Siegen, Germany. |
推荐引用方式 GB/T 7714 | Wu, Zhanling,Bai, Yizhen,Qu, Wenchao,et al. Al-Mg-B thin films prepared by magnetron sputtering[J]. 5th Symposium on Vacuum based Science and Technology,2010,85:541-545. |
APA | Wu, Zhanling.,Bai, Yizhen.,Qu, Wenchao.,Wu, Aimin.,Zhang, Dong.,...&Jiang, Xin.(2010).Al-Mg-B thin films prepared by magnetron sputtering.5th Symposium on Vacuum based Science and Technology,85,541-545. |
MLA | Wu, Zhanling,et al."Al-Mg-B thin films prepared by magnetron sputtering".5th Symposium on Vacuum based Science and Technology 85(2010):541-545. |
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