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	Rapid thermal annealing of ITO films
	ShumeiSong; Tianlin Yang; JingjingLiu; YanqingXin; Yanhui Li; ShenghaoHan
刊名	Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials
	2011
卷号	257期号:16页码:7061-7064
关键词	ito film rapid thermal annealing resistivity transmittance
DOI	10.1016/j.apsusc.2011.03.009
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/5247868
专题	山东大学
作者单位	1.School of Space Science and Physics, Shandong University at Weihai, Weihai 264209, Shandong, China 2.School of Space Science and Ph
推荐引用方式 GB/T 7714	ShumeiSong,Tianlin Yang,JingjingLiu,et al. Rapid thermal annealing of ITO films[J]. Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2011,257(16):7061-7064.
APA	ShumeiSong,Tianlin Yang,JingjingLiu,YanqingXin,Yanhui Li,&ShenghaoHan.(2011).Rapid thermal annealing of ITO films.Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,257(16),7061-7064.
MLA	ShumeiSong,et al."Rapid thermal annealing of ITO films".Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials 257.16(2011):7061-7064.

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