The effect of duty cycle on the microstructure and properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering

CORC > 兰州化学物理研究所 > 中国科学院兰州化学物理研究所 > 固体润滑国家重点实验室

	The effect of duty cycle on the microstructure and properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering
	Zhou HD(周惠娣); Li HX(李红轩); Ji L(吉利); Chen JM(陈建敏); Chen JM(陈建敏); Liu XH(刘晓红)
刊名	Journal of Physics D: Applied Physics
	2010
卷号	43 页码:505401(1-8)
ISSN号	0022-3727
通讯作者	陈建敏
中文摘要	The effect of duty cycle on the microstructure and properties of graphite-like amorphouscarbon ﬁlms prepared by unbalanced magnetron sputtering was investigated. The structure ofthe resultant carbon ﬁlm is amorphous, as shown by high-resolution transmission electronmicroscopy. Raman analysis shows that the studied ﬁlms are dominated by sp2sites, and theintensity ratio of the D and G peaks ranges from 4.0 at a duty cycle of 20% to 6.0 at 50%,which is one order of magnitude larger than that of diamond-like carbon ﬁlms, indicating anobvious increase in sp2sites with duty cycle. The surface morphology was investigated byatomic force microscopy. The images show that the as-deposited carbon ﬁlms have a veryrough surface, and the maximum granular structure size is up to 180 nm in diameter and 50 nmin height. The hardness and internal stress of the resultant carbon ﬁlms increase withincreasing duty cycle, accompanied by an increase in sp2fraction in the ﬁlms, which isdifferent from the diamond-like carbon ﬁlms. In addition, the resultant carbon ﬁlms showsuperior tribological properties with high load-bearing capacity and excellent wear resistance.The inﬂuence of duty cycle on the microstructure and properties is discussed in detail.
学科主题	材料科学与物理化学
收录类别	SCI
资助信息	the National Natural Science Foundation of China (Grant No 50705093);the Innovative Group Foundation from NSFC (GrantNo 50421502);the National 973 Project (No 2007 CB607601)
语种	英语
WOS记录号	WOS:000284942800015
公开日期	2012-09-28
内容类型	期刊论文
源URL	[http://210.77.64.217/handle/362003/1025]
专题	兰州化学物理研究所_固体润滑国家重点实验室兰州化学物理研究所_先进润滑与防护材料研究发展中心
通讯作者	Chen JM(陈建敏); Chen JM(陈建敏)
推荐引用方式 GB/T 7714	Zhou HD,Li HX,Ji L,et al. The effect of duty cycle on the microstructure and properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering[J]. Journal of Physics D: Applied Physics,2010,43:505401(1-8).
APA	周惠娣,李红轩,吉利,陈建敏,陈建敏,&刘晓红.(2010).The effect of duty cycle on the microstructure and properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering.Journal of Physics D: Applied Physics,43,505401(1-8).
MLA	周惠娣,et al."The effect of duty cycle on the microstructure and properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering".Journal of Physics D: Applied Physics 43(2010):505401(1-8).