The effect of duty cycle on the microstructure and properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering | |
Zhou HD(周惠娣)![]() ![]() ![]() ![]() ![]() ![]() | |
刊名 | Journal of Physics D: Applied Physics
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2010 | |
卷号 | 43页码:505401(1-8) |
ISSN号 | 0022-3727 |
通讯作者 | 陈建敏 |
中文摘要 | The effect of duty cycle on the microstructure and properties of graphite-like amorphouscarbon films prepared by unbalanced magnetron sputtering was investigated. The structure ofthe resultant carbon film is amorphous, as shown by high-resolution transmission electronmicroscopy. Raman analysis shows that the studied films are dominated by sp2sites, and theintensity ratio of the D and G peaks ranges from 4.0 at a duty cycle of 20% to 6.0 at 50%,which is one order of magnitude larger than that of diamond-like carbon films, indicating anobvious increase in sp2sites with duty cycle. The surface morphology was investigated byatomic force microscopy. The images show that the as-deposited carbon films have a veryrough surface, and the maximum granular structure size is up to 180 nm in diameter and 50 nmin height. The hardness and internal stress of the resultant carbon films increase withincreasing duty cycle, accompanied by an increase in sp2fraction in the films, which isdifferent from the diamond-like carbon films. In addition, the resultant carbon films showsuperior tribological properties with high load-bearing capacity and excellent wear resistance.The influence of duty cycle on the microstructure and properties is discussed in detail. |
学科主题 | 材料科学与物理化学 |
收录类别 | SCI |
资助信息 | the National Natural Science Foundation of China (Grant No 50705093);the Innovative Group Foundation from NSFC (GrantNo 50421502);the National 973 Project (No 2007 CB607601) |
语种 | 英语 |
WOS记录号 | WOS:000284942800015 |
公开日期 | 2012-09-28 |
内容类型 | 期刊论文 |
源URL | [http://210.77.64.217/handle/362003/1025] ![]() |
专题 | 兰州化学物理研究所_固体润滑国家重点实验室 兰州化学物理研究所_先进润滑与防护材料研究发展中心 |
通讯作者 | Chen JM(陈建敏); Chen JM(陈建敏) |
推荐引用方式 GB/T 7714 | Zhou HD,Li HX,Ji L,et al. The effect of duty cycle on the microstructure and properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering[J]. Journal of Physics D: Applied Physics,2010,43:505401(1-8). |
APA | 周惠娣,李红轩,吉利,陈建敏,陈建敏,&刘晓红.(2010).The effect of duty cycle on the microstructure and properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering.Journal of Physics D: Applied Physics,43,505401(1-8). |
MLA | 周惠娣,et al."The effect of duty cycle on the microstructure and properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering".Journal of Physics D: Applied Physics 43(2010):505401(1-8). |
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