Microstructure, mechanical and tribological properties of graphite-like amorphous carbon ﬁlms prepared by unbalanced magnetron sputtering

CORC > 兰州化学物理研究所 > 中国科学院兰州化学物理研究所 > 固体润滑国家重点实验室

	Microstructure, mechanical and tribological properties of graphite-like amorphous carbon ﬁlms prepared by unbalanced magnetron sputtering
	Li HX(李红轩); Chen JM(陈建敏); Chen JM(陈建敏); Zhou HD(周惠娣); Liu XH(刘晓红); Ji L(吉利)
刊名	Surface and Coatings Technology
	2011
卷号	205 页码:3058-3065
关键词	Unbalanced magnetron sputtering Bias voltage Graphite-like carbon ﬁlm Microstructure Tribological properties
ISSN号	0257-8972
通讯作者	陈建敏
中文摘要	Graphite-like amorphous carbon (GLC) ﬁlms were fabricated by unbalanced magnetron sputtering on silicon and stainless steel substrates. The effects of deposition bias voltage on the microstructure, mechanical and tribological properties of the resultant ﬁlms were investigated by means of X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, atomic force microscopy (AFM), high resolution transmission electron microscopy (HRTEM), nano-indentation and tribological experiments, respectively. The results show that the present ﬁlms are dominated by sp2 sites, and the microstructure and properties of the resultant ﬁlms strongly depend upon the deposition bias voltage. Namely, the sp3 content, hardness, elastic modulus and critical load monotonically increase with increasing deposition bias voltage from 50 to 150 V, and then they decrease with further increasing the bias voltage to 185 V, while internal stress decreases at ﬁrst and then increases with further increasing of deposition bias voltage. The ﬁlms deposited at different bias voltages have high surface roughness. Tribological properties of the ﬁlms are closely related with the deposition bias voltage, 150 V is the optimum value for obtaining good wear resistance.
学科主题	材料科学与物理化学
收录类别	SCI
资助信息	the Natural Science Foundation of China (Grant NO.50705093;NO.50575217);the Innovative Group Foundation from NSFC (Grant NO.50421502);the National 973 Project (NO.2007 CB607601)
语种	英语
公开日期	2012-09-24
内容类型	期刊论文
源URL	[http://210.77.64.217/handle/362003/816]
专题	兰州化学物理研究所_固体润滑国家重点实验室兰州化学物理研究所_先进润滑与防护材料研究发展中心
通讯作者	Chen JM(陈建敏); Chen JM(陈建敏)
推荐引用方式 GB/T 7714	Li HX,Chen JM,Chen JM,et al. Microstructure, mechanical and tribological properties of graphite-like amorphous carbon ﬁlms prepared by unbalanced magnetron sputtering[J]. Surface and Coatings Technology,2011,205:3058-3065.
APA	李红轩,陈建敏,陈建敏,周惠娣,刘晓红,&吉利.(2011).Microstructure, mechanical and tribological properties of graphite-like amorphous carbon ﬁlms prepared by unbalanced magnetron sputtering.Surface and Coatings Technology,205,3058-3065.
MLA	李红轩,et al."Microstructure, mechanical and tribological properties of graphite-like amorphous carbon ﬁlms prepared by unbalanced magnetron sputtering".Surface and Coatings Technology 205(2011):3058-3065.